Abstract
Positron lifetime investigations on B-doped and undoped chemical vapor deposition diamond films have shown that B-doping at 500 ppm almost completely removes vacancies from the film. The 1.68 eV photo luminescence (PL) line is also removed. For undoped films, large concentrations (≈10 18 cm −3) of vacancy clusters (approximately 6 vacancies) and mono- or divacancies are observed. Small observable effects arising from annealing up to 1100°C could be found in both B-doped or undoped films. There is no correlation between the width of the 1.68 eV PL line and the vacancy concentration.
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