Abstract
Positive secondary ion yields of 20 elements under In +- and O 2 + bombardement are compared for oxygen-saturated surfaces. In +-ions were produced in a newly developed electrohydrodynamic (EHD) ion source, while O 2 +-ions were generated in a duoplasmatron. Practical sensitivities for In +2-bombardement exceed those for O 2 +-bombardement by a factor correlated to the respective sputtering yield ratios. These results indicate that indium ions from a liquid metal ion source may be successfully applied as primary ions in secondary ion mass spectrometry.
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