Abstract
Mass spectra of positive ions (cations) and neutrals have been measured in hydrogen diluted silane plasmas at gas pressures of 0.1–10 Torr. The mass spectrum of ions changes with the pressure, while that of neutrals maintains a similar shape. The dominant ion species varies from a hydrogen ion group at ≲0.5 Torr to a monosilicon hydride ion group at ≈0.5–1 Torr and polysilicon hydride ion groups at ≳1 Torr, which is determined from ionization channels and consecutive ion-molecule reactions. The ion bombardment is suppressed with the pressure, from several tens of eV at ≲1 Torr to a few eV at ≳7 Torr.
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