Abstract

Coherence scanning interferometry (CSI) [1][2] is a non-contact versatile and fast technology for precision measurements of samples with lateral dimensions of a few micrometers up to a few centimeters. CSI can even measure on rough surfaces and have a large vertical measurement range which is only limited by the maximum displacement of the employed mechanical scanning stage. The resolution and accuracy in vertical direction can be in the nanometer range but are strongly dependent on the positioning noise and accuracy of the scanning stage.

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