Abstract
In this paper, we introduce a position feedback control for an electrostatically controlled linear actuator. The electrostatically controlled linear actuator, which is fabricated using microelectromechanical systems technology, drives sliders in parallel, precise motion, and a large stroke. In literature, novel technologies have been studied for an improvement of this actuator. Among these, a micro-potentiometer that utilized probe dipping into a μ-pool technology has been employed to detect position of the slider for electrostatically controlled linear actuator control. In this research, we are interested in proportional---integral---derivative feedback control using a micro-potentiometer and microcontroller as our current development stage of the electrostatically controlled linear actuator. Experimental results show that the feedback control with tuning gains performed a significant improvement compared to that without tuning gains. The slider was moved to the desired position with reduced control time, no overshoot, oscillation, and acceptable steady-state error.
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