Position-Controlled Carbon Fiber Growth Catalyzed Using Electron Beam-Induced Chemical Vapor Deposition Ferrocene Nanopillars

Abstract

We demonstrated nanotube growth on a position-controlled catalyst using electron beam-induced chemical vapor deposition (EB-CVD) ferrocene nanopillars. While solid phase graphitization was induced at 650°C, iron nanoparticles only appeared on the surface by eroding the surrounding graphite triggered by the gas phase carbon fiber growth, at a temperature higher than 800°C using ethanol vapor. The precise position control achieved by EB-CVD directly reflected that of carbon fiber growth, which is a promising position-controlled carbon nanotube growth method for future device applications.