Abstract
This paper describes the position control of a dual-stage actuator with piezoelectric actuator using self-sensing actuation. The dual-stage servo system consists of a coarse actuator and a fine actuator. A DC servo motor is used as the coarse actuator, and a piezoelectric actuator provides fine control. The position control of the dual-stage actuator us ing the dual feedback method and self-sensing is presented. Experimental results show the validity of the proposed control system
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