Abstract
In the paper optical properties and surface morphology of thin porous silicon layers on insulator substrate are investigated. It is shown that porous silicon can be formed from microcrystalline silicon layers and its morphology depends on type and orientation of insulator substrate. It was noticed that porous silicon transmission spectra notably differ from thin silicon spectra. Luminescence can be observed not only in the UV area (350–400 nm), but also in IR area (1000–1100 nm). This IR luminescence can be intensified by gold or silver nanoparticles chemically deposited on porous silicon surface.
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