Abstract
Sensory elements based on hybrid films containing porous silicon and reduced graphene oxide nanostructures have been created. A decrease in electrical resistance and an increase in the capacitance of sensor elements in the AC mode due to the adsorption of ethanol molecules have been registered. To assess the sensory properties of hybrid films, the concentration dependences of the adsorption ability in the 0–4.5% range were determined and the dynamic characteristics of ethanol sensors based on them were studied. It was found that sensor films with different ratios of porous silicon and reduced graphene oxide nanoparticles have the maximum sensitivity to ethanol in different concentration ranges. The functional properties of hybrid films can be controlled by changing the proportions of their components. The reaction time of sensory elements to changes in the concentration of ethanol molecules is 40–50 s. The obtained results expand the perspective of the application of nanosystems based on porous silicon in sensor devices.
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