Abstract
Porous silicon multilayered microstructures have unique optical and morphological properties that can be exploited in chemical and biological sensing. The large specific surface of nanostructured porous silicon can be chemically modified to link different molecular probes (DNA strands, enzymes, proteins and so on), which recognize the target analytes, in order to enhance the selectivity and specificity of the sensor device. We designed fabricated and characterized several photonic porous silicon-based structures, which were used in sensing some specific molecular interactions. The next step is the integration of the porous silicon-based optical transducer in biochip devices: at this aim, we have tested an innovative anodic bonding process between porous silicon and glass, and its compatibility with the biological probes.
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