Abstract

Abstract A porous layer is generated by electrochemical dissolution of silicon in HF. This new material has some very interesting applications in microstructuring, sensorics, microelectronics and microoptics. The etching process and the morphology of porous silicon are described. Possible applications are discussed.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call