Abstract
Results are presented on the characteristics of a porous platinum leak, of about 10−8 liters/sec nitrogen conductance, as the basic element for the control and measurement of gas flowrate into a vacuum gauge calibration system. The leak produced free-molecule type flow for supply pressures ranging from 8 to 800 Torr, and for ten different gases whose molecular weights ranged from 2 to 131. Leak conductances were determined to within a few percent limit of error by measuring the pressure rise in a known volume downstream of the leak. Since this pressure-rise method requires less than 10 min to perform, it can be done at any convenient time during a gauge calibration. Results are also presented on the relative sensitivity of a high-pressure ion gauge for ten gases at 10−4 Torr and on the gauge's nonlinearity (for N2) in the range 10−4 to 1 Torr.
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