Abstract
The porosity of zirconia films prepared by plasma ion assisted deposition has been investigated by means of optical (spectrophotometric) and nonoptical analytic techniques such as transmission electron microscopy, x-ray reflection, and energy dispersive x-ray spectroscopy. A discrimination between large (open) and small (closed) pores was achieved by means of measurement of the thermal and vacuum-to-air shift. Depending on the level of plasma assistance during film preparation, the porosity was found to vary between 30vol.% and nearly 0vol.%. With decreasing porosity, the surface roughness determined by atomic force microscopy tends to decrease as well.
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