Abstract

The response of hydrogen sensor based on nanoporous palladium (Pd) supported by robust anodic aluminum oxide (AAO) substrate was enhanced by pore-widening treatment using phosphoric acid (H 3 PO 4 ) as etching solution. It is demonstrated that different concentration of H3PO4 and different pore-widening time lead to different pore-diameters of AAO resulting in different performance of hydrogen sensor. The optimized hydrogen sensor shows a fast response time of 19s at H 2 concentration of 1% and a wide detection range of H 2 concentration from 0.1% to 2% by pore-widening treatment with a time of 30 minute in 5%H 3 PO 4 concentration.

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