Abstract
Strain-gauge transducers with polysilicon resistors can be used successfully in various sensors. They have some advantages in comparison to monocrystalline silicon strain-gauge transducers. However, not enough information is available for the qualitative design of such transducers. The theoretical principles of the temperature dependence of the output signal for a constant supply voltage and constant supply current are described. A polysilicon strain-gauge transducer with a square diaphragm fabricated on the discussed principles is reported. It has an operating temperature range of −190- +300 °C, and weak temperature dependence of the output signal.
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