Abstract
In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS) was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10−7 nm−1, respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG). The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD) of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.
Highlights
The microminiaturization sensing devices based on the micro-electromechanical system (MEMS)technique have been widely used in the applications of biological and chemical detections [1,2].Micro-cantilevers, beam structures with one end fixed on the substrate and with a thickness in several micrometer range, exhibit various attractive properties and have been successfully used as biochemical detection platforms due to their small size and ultra-high sensitivity [3,4,5]
This paper develops a fully polymeric flexible cantilever-based immunosensor for sensitive selective detection of human immunoglobulin G (IgG) in phosphate buffered saline (PBS) buffer, where PEDOT/PSS conductive layer was fabricated and selective detection of human IgG in PBS buffer, where PEDOT/PSS conductive layer was and patterned to be piezoresistors encapsulated in the top and bottom parylene-C layers
Fabricated polymeric micro-cantilever based on PEDOT/PSS conductive layer was demonstrated to
Summary
The microminiaturization sensing devices based on the micro-electromechanical system (MEMS). Sensing due to its hygroscopic nature [17], so the output of piezoresistive micro-cantilever based on Recently, the flexible microminiaturization sensors provide another unique opportunity in the SU-8 is unstable when exposed to liquid phase for an extended period of time. Poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS), a typical flexible conductive for increasing the stability of piezoresistive micro-cantilevers [18]. The flexible microminiaturization sensors provide another unique in the polymer, isRecently, highly interesting due to its high conductivity, thermal stability, andopportunity low cost processing application of detecting biological substances with the emergence of organic electronics ability [24,25]. (PEDOT/PSS), a typical flexible electromechanical sensor based on the piezoresistive effect [26,27,28,29,30]. An (LOD)immunosensor of 10 ng/mL.was developed by the functionalization of the micro-cantilevers, which can be used to trap human immunoglobulin G (IgG) molecules in phosphate buffered saline (PBS) with the limit
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