Abstract
Pressure measurement with excellent stability and long time durability is highly desired, especially at high temperature and harsh environments. A polymer-derived silicoboron carbonitride (SiBCN) ceramic pressure sensor with excellent stability, accuracy, and repeatability is designed based on the giant piezoresistivity of SiBCN ceramics. The SiBCN ceramic sensor was packaged in a stainless steel case and tested using half Wheatstone bridge with the uniaxial pressure up to 10 MPa. The SiBCN ceramic showed a remarkable piezoresistive effect with the gauge factor (K) as high as 5500. The output voltage of packed SiBCN ceramic sensor changes monotonically and smoothly versus external pressure. The as received SiBCN pressure sensor possesses features of short response time, excellent repeatability, stability, sensitivity, and accuracy. Taking the excellent high temperature thermo-mechanical properties of polymer-derived SiBCN ceramics (e.g., high temperature stability, oxidation/corrosion resistance) into account, SiBCN ceramic sensor has significant potential for pressure measurement at high temperature and harsh environments.
Highlights
Pressure sensor is highly desired to provide online health monitoring and improve the safety of modern industry, especially for those of high temperature and harsh environments such as turbine engines and coal gasification [1,2]
In order to convert the output resistance change into voltage signal, a half Wheatstone bridge circuit is designed, as shown in Fig. 1, which composed of the silicoboron carbonitride (SiBCN) ceramic sensor head (R) and standard resistance (R0) for matching purpose
It can be seen that the resistance of SiBCN ceramic sensor head decreases monotonically with increasing applied pressure indicating that SiBCN ceramic is adequate for pressure sensing
Summary
Pressure sensor is highly desired to provide online health monitoring and improve the safety of modern industry, especially for those of high temperature and harsh environments such as turbine engines and coal gasification [1,2]. PDCs are a promising candidate for pressure sensing with remarkable sensitivity and stability, especially at high temperature and harsh environments. These unique properties are ascribed to their unique microstructures with a nanodomain structure consisting of Si-based amorphous matrix and highly disordered carbon clusters, named free-carbon phase [20,21]. A piezoresistive pressure sensor made of polymer-derived SiBCN ceramic is reported for the first time. The piezoresistivity of SiBCN ceramic sensor and relative sensing performance of stability, repeatability, and response time were discussed, indicating the promising potential application at high temperature and harsh environments of SiBCN ceramic pressure sensor
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