Abstract
A novel polymer-based fluid-actuated variable focal length microlens system with a wide field-of-view (FOV) and large numerical aperture is designed and fabricated using standard photolithographic and silicon micromachining techniques. A flexible polydimethylsiloxane (PDMS) membrane is used to form the lens surface and is actuated by fluidic pressure applied by an external syringe pump. This lens system is capable of working in dual mode, forming either a double convex (DCX) or a double concave (DCV) lens. The relationship between the focal length (f) and FOV of the fabricated dynamic lens system as a function of the volume of the fluid pumped into or out of the lens chamber is investigated. The focal length of the dynamic lens system demonstrated in this paper could be tuned in the range of 75.9 to 3.1 mm and −75.9 to −3.3 mm for the DCX and DCV lens configurations, respectively. The FOV for this lens system was found to be in the range of 0.12 to 61° for DCX lens and 7 to 69° for DCV lens. The smallest F-number (f/#) that could be achieved using this dynamic lens is 0.61, which corresponds to the numerical aperture value of 0.64.
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