Abstract
Cobalt-doped Zinc oxide thin film was deposited onto SiO 2 /Si substrate using polymer-assisted deposition method. The surface morphology, phase structure and chemical state of the thin film were characterized by SEM, XRD, and XPS. The gas-sensing characteristics of the thin film upon exposure to aromatic organic compound vapors were investigated with a home-made sensor measurement system. The current results show that the film morphology is influenced by the doping of Co, and the sensor behavior was quite different between undoped and Co-doped ZnO thin films.
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