Abstract
This study aims to machine complex three dimensional nano-structures on polymer surfaces directly using the Atomic Force Microscopy (AFM)-based nano-mechanical processing method. Processing parameters including the normal load, the feed rate, the machining speed and the scanning direction are optimized by the Taguchi method. Their effects on the machined depth and the surface roughness of the machined structures are analyzed. Meanwhile, the AFM PZT tube is controlled to achieve the tip’s three-dimensional motions in space. Using the optimized processing parameters, three-dimensional nanostructures on the surface of PMMA are directly fabricated. It is a novel low-cost manufacturing method for machining complex three-dimensional nano-structures or nano parts on polymer surfaces directly.
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