Abstract

Nano and Submicron ceramic oxide fibers of tin oxide (SnO 2 ) have been processed using the polymer fibers as templates. Highly porous fibrous mat of hydroxypropyl cellulose (HPC) polymer (molecular weight 80000 g/mol) has been obtained via electrospinning technique. In order to derive the ceramic oxide fibers using the polymer fibers as templates, the electrospinning characteristics of the HPC polymer has been established by varying the critical processing parameters such as polymer concentration, solvent type, tip-to-electrode distance, feeding speed, and applied voltage. Under selected processing conditions, the Sn-precursor is mixed with the polymer solution in alcohol, and then, the electrospun porous HPC polymer mat is converted to porous ceramic fiber network by using a suitable calcination treatment. Nano and submicron fibers of snO 2 have been deposited on the microelectromechanical system (MEMS) device, consisting oxidized silicon (Si/SiO 2 ) wafer with gold (Au) electrode pattern. Such micro-device is highly suitable for the room temperature gas (typically hydrogen) sensing application. In conclusion, very effective polymer assisted processing of ceramic oxide nano and submicron fibers have been demonstrated for the low temperature gas sensing application.

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