Abstract
InterDigitated Capacitive (IDC) sensor arrays are fabricated with conventional microelectronics-micromachining technologies on quartz substrates. After fabrication, a polymeric well is patterned around each IDC to precisely define the sensing area and thus deposit coatings of various polymers, by drop casting, in a reproducible and controlled manner. The gas sensing performance of the IDC array is presented for humidity and p-xylene.
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