Abstract
A microring resonator with the multimode interference coupler is fabricated on the polymer platform by using UV-based soft nanoimprint technique. A unique class of fluorinated polymer, perfluoropolyether (PFPE), is employed for the fabrication of the flexible soft mold. By optimizing the proportion between Ormocore and the thinner maT, the microring resonator is fabricated almost without residual layer. The fabricated device with a Q-factor up to 2.3 × 104 is demonstrated for very-near-infrared wavelengths, which shows high potential for sensing applications.
Highlights
Integrated optics has been playing important roles in the optics communication and sensing areas in recent years
Structure which has good fabrication tolerance was designed to couple the light between the microring structure which has good fabrication tolerance was designed to couple the light between the structure whichwaveguide
Has good fabrication tolerance was designedwhich to couple between and the straight
Summary
Integrated optics has been playing important roles in the optics communication and sensing areas in recent years. The MMI coupler is based on the self-imaging effect It has advantages such as high fabrication tolerance and insensitivity to the wavelength and the polarization. It can just reach several fixed coupling ratios by adjusting the structure of the multimode waveguide. By using a mechanical imprinting process, one can avoid the diffraction limit which is inevitable in the UV lithography and reach a high resolution Since it is based on the replication technology, the quality of the master mold is very important. A microring resonator with MMI coupler was demonstrated on the low-cost polymer platform. The microring resonator was fabricated by Soft UV NIL which is a cost-effective and high-throughput technique. The fabricated device with a Q-factor up to 2.3 × 104 showed high potential for sensing applications
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