Polydiagnostic calibration performed on a low pressure surface wave sustained argon plasma

Abstract

The electron density and electron temperature of a low pressure surface wave sustained argon plasma have been determined using passive and active (laser) spectroscopic methods simultaneously. In this way the validity of the various techniques is established while the plasma properties are determined more precisely. The electron density, ne, is determined with Thomson scattering (TS), absolute continuum measurements, Stark broadening and an extrapolation of the atomic state distribution function (ASDF). The electron temperature, Te, is obtained using TS and absolute line intensity (ALI) measurements combined with a collisional–radiative (CR) model for argon. At an argon pressure of 15 mbar, the ne values obtained with TS and Stark broadening agree with each other within the error bars and are equal to (4 ± 0.5) × 1019 m−3, whereas the ne value (2 ± 0.5) × 1019 m−3 obtained from the continuum is about 30% lower. This suggests that the used formula and cross-section values for the continuum method have to be reconsidered. The electron density determined by means of extrapolation of the ASDF to the continuum is too high (∼1020 m−3). This is most probably related to the fact that the plasma is strongly ionizing so that the extrapolation method is not justified. At 15 mbar, the Te values obtained with TS are equal to 13 400 ± 1100 K while the ALI/CR-model yields an electron temperature that is about 10% lower. It can be concluded that the passive results are in good or fair agreement with the active results. Therefore, the calibrated passive methods can be applied to other plasmas in a similar regime for which active diagnostic techniques cannot be used.