Abstract
Thin films of lithium niobate (LiNbO3) were studied by Fourier transform infrared and micro-Raman spectroscopy. The films were prepared on SiO2/Si substrate at substrate temperatures of 650, 700 and 750 °C from monocrystalline or sintered LiNbO3 targets, using KrF excimer laser ablation. The films were polycrystalline. The changes of film properties and E and A1 phonon spectra with deposition conditions were studied, and were compared with bulk data.
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