Abstract
In this technical note we demonstrate poly-Si heaters for electrically-controlled ultra-fast local temperature change of on-wafer test structures. By comparing two different heaters, design guidelines are proposed for optimizing the power-to-temperature conversion and the reliability of the structure. Local temperature changes up to +350°C are demonstrated, with a remarkable heating speed of ∼20,000°C/s. The spatial temperature profile around the heating structure is also studied.
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