Abstract
The thin mirrors are widely used in active optical system. In this letter, magnetic medium assistant polishing (MMAP) technology and device are discussed for thin mirrors optical finishing. The principle of MMAP is introduced, the magnetic tool for polishing is designed, and the removal function of magnetic polishing tool is studied. On the basis study of the material removal function especially removal property in the edge region, the tool-path is optimized, and the dwell time distribution of computer-controlled MMAP is researched. The glass thin mirror is polished by MMAP technology. The diameter of the work-piece equals S22201 150 mm and the thickness is 5 mm. The initial surface error is 0.19\lambda (root mean square (RMS)) , and after two steps fabrication, the final surface error reaches 0.02\lambda. The experimental rsults verify that the technology is effective for thin mirrors finishing.
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