Abstract
Subsurface damage (SSD) is inevitably generated during the grinding process of quartz glass. It has a great impact on sustainability, lifetime and optical performance of quartz glass components and systems. This paper proposes a non-destructive detection method for detecting SSD in ground quartz glass based on polarized laser scattering (PLS). A PLS system was built to detect SSD in ground quartz glass samples prepared with different abrasive particle sizes. The PLS detection signal value had a positive correlation with the SSD depth. The finite-difference time-domain (FDTD) method was used to simulate the laser scattering process at the SSD. The distribution of electric field intensity could reflect the location of SSD. It is concluded that the PLS system can effectively detect SSD in the ground quartz glass.
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