Abstract
A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to measure precisely the thickness of thin film. Five images are collected sequentially by CCD camera with respect to five pre-determined azimuth angles of a quarter wave plate (QWP) during measurement. Then two-dimensional (2-D) distributions of the ellipsometric parameters ψ and Δ over the full dynamic range are obtained. Conceptually, PM imaging ellipsometer integrates the features of phase shift interferometry with conventional photometric ellipsometry by rotating the QWP sequentially to produce polarization modulation that is able to measure the thickness of a thin film in two dimensions precisely and quickly. The basic principle of PM imaging ellipsometer is derived wherein features such as common path configuration, full dynamic range of measurement, and insensitive to non-uniform response of the CCD are analyzed. The experimental results verify the ability and performance of PM imaging ellipsometer on 2-D thin film thickness, while the errors regarding the ellipsometric parameters measurements are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
