Polarity-controlled AlN/Si templates by in situ oxide desorption for variably arrayed MOVPE-GaN nanowires

Abstract

In this paper, we present a comprehensive study of position-defined Al-polar AlN nucleation on lithographically patterned Si(111) substrates as a method to obtain ordered Ga-polar GaN nanowire arrays, with possible application in future nanowire-based devices such as LEDs and photoelectrochemical water-splitting cells. In a hydrogen processing step, ex situ prepared oxide on pre-structured Si-pillars could be selectively removed. This enabled Al-polar AlN nucleation on the Si-pillar’s sidewalls during the following metal–organic vapor phase epitaxy, while dominant N-polar AlN layer growth was observed on the still oxidized Si(111) horizontal substrate surface neighboring the pillars. 100% of the Ga-polar GaN wires are emerging on the Al-polar AlN growth sites, thus selective area epitaxy without any mask material could be realized. To gain a precise understanding of the growth mechanisms, the attainable Ga-adatom collection area per NW was varied by changing the Si-pillars’ placement pattern. The wire length and diameter increase with extended pitch. At a constant pitch, the size of the wires is adjustable by variation of the Si-pillars’ diameter, therefore growth of GaN wires of controllable dimension and pitch could be attained. Additionally, parasitic NW growth was completely suppressed for any pitch < 3.5 µm, while an increased pitch resulted in additional parasitic growth. Based on these results a model was derived, which includes the site-controlled removal of the oxide, the thus achieved local polarity control of AlN growth, and the influence of the collection area of each NW with respect to their size, whereas the collection area could be set in the experiment by adjustment of the lithographically controlled pitch and growth-parameter dependent Ga-adatom diffusion length. The mask-less polarity- and site-controlled growth of NWs with a height of 5.3 µm ± 0,33 µm and a diameter of 800 nm ± 160 nm at a pitch of 2.5 µm could be attained. Hence, a deep understanding of the growth mechanisms and the geometrical control of polarity- and site-controlled GaN NWs could be achieved, forming the base for development of NW-based devices on a conductive AlN/Si-template.