Abstract
Polarity control of MOVPE InN on sapphire (0001) was investigated. Two kinds of polarity InN films on sapphire substrate by MOVPE have been prepared by controlling the substrate nitridation process and/or the LT-GaN buffer annealing process. Surface of the nitrided sapphire is a crucial factor in determining the polarity of InN film. N-polarity InN film was grown on the 1000 °C-nitrided substrate without LT-GaN buffer; while In-polarity InN film was grown on the 900 °C-nitrided substrate. In the case of InN growth with a LT-GaN buffer, buffer annealing is a crucial issue in determining the polarity of InN film. N- and In-polarity InN films were obtained on the long-time-annealed buffer and the short-time-annealed buffer, respectively. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
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