Abstract
Self-seeded aluminum nitride (AlN) crystals were successfully grown in a tungsten crucible by the sublimation method. The polarities along the growth direction of these AlN samples were characterized by chemical etching, combined with high-resolution transmission electronic microscopy (HRTEM) and Raman spectroscopy. It has been proven by our experimental results that etching in KOH solution and in molten KOH-NaOH can be a reliable method to determine the surfaces with different polarities. Chemically active N-polar (0001) AIN surfaces were removed appreciably, while only etch pits related to threading dislocations were observed on Al-polar surfaces after chemical etching. HRTEM images revealed that there are noticeable inversion domain boundaries in the samples. Raman spectrum measurements showed the vibration mode change before and after etching in the same geometrical arrangement.
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