Abstract
Exhaustive studies in the literature detail the Mueller matrices properties through decomposition, optical entropy and depolarization formalism. It has been applied for many years in rather different fields. In radar polarimetry, mathematical basis of depolarizing systems, have been first developed. In the visible range optics, standard diattenuation and retardance, decomposition is currently used in turbid organic media. The optical entropy concept, developed by S.R. Cloude, provides a very powerful analysis technique yielding important surface parameters such as depolarization, correlation and roughness. Complementary applications exist in scatterometry, for thin periodic grating films. With high capability polarimeters, such as the next generation of angle resolved polarimeters instruments, Polarimetry opens new fields of investigation for nanotechnologies materials as well as for gratings and photonics structures analysis: a program presently developed through a national consortium ANR08-NANO-020-03. With this instrumentation progress, simulation remains a key point to overpass as a challenge between future instruments. The theories for surfaces spectral power density (PSD) and the random coupled wave approximation (RCWA) in periodic structures are widely described in the literature. The implementation of some of these codes is described here for surface analysis and lithography scatterometry structures: grating overlay or double patterning.
Highlights
Exhaustive theoretical studies describing the role of Mueller matrices in Polarimetry are applied to many domains such as nanotechnologies, surfaces, earth sciences, astrophysics, thin films interface properties, surface roughness, photonics items, periodic gratings, diffracting objects and even living organisms in medicine
The variable angle spectroscopic ellipsometers (VASE) systems are being equipped with rotating compensators in order to achieve a full Mueller matrix measurement capacity
The pioneer works has been accomplished by Leroy-Brehonnet [4], In some cases the former effective medium approximation (EMA) theory remains not sufficient when processing accurate SE data
Summary
Exhaustive theoretical studies describing the role of Mueller matrices in Polarimetry are applied to many domains such as nanotechnologies, surfaces, earth sciences, astrophysics, thin films interface properties, surface roughness, photonics items, periodic gratings, diffracting objects and even living organisms in medicine. In the classical polar decomposition, any Mueller matrix [M] can be seen as the product of depolarization, retardance and diattenuation. The interpretation ofҏ Dҏ, is an estimate of the system average scattering mechanism or in other words, its corresponding the entropy S: For an isotropic depolarizer, the Mueller matrix is diagonal.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
