Abstract
ABSTRACTWe investigated the Czochralski growth of LiGaO2 single crystal for use as a substrates for the epitaxial growth of hexagonal GaN. Crossed lines were observed in mechano-chemically polished {001} wafers sliced from a (001) axis boule. Chemical etching revealed that there exists a difference in chemical stability between two domains separated by a crossed line. Since LiGaO2 single crystal is polar along the c-axis, the formation of multi-domain structure is due to the polarity inversion of the c-axis, that is, polar twinned defects. We found that the GaN thin film on the (001) substrate with a multi-domain structure peeled off and that this is closely related with multi-polarity of substrate.
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