Abstract
It is shown that point defects are predominantly generated by irradiating low energy noble gas ions onto a graphite (0001) surface. Scanning tunneling microscopic images of the graphite surface irradiated with 50 eV Ar + ions show a structure corresponding to a point defect in which only one or two surface atoms are displaced. The process of ion penetration and trapping into the graphite is investigated as a function of ion energy in the range of 1–500 eV. Trapping efficiency rapidly increases with ion energy in the threshold region (10–100 eV), and leads to a saturation for higher energies. The penetration and trapping mechanism is discussed in relation to defect formation on the surface.
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