Abstract
SUMMARYA comparison is made for three point cathodes which are used in an electron gun forming a virtual rather than real source. The three cathodes operate in the field emission (FE), thermal‐field (TF) and Schottky emission (SE) regimes. A low angular intensity is chosen for this comparison, typical of an SEM as contrasted to an electron‐beam lithography system application. Energy spread, virtual source size and current fluctuations are compared.
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