Abstract
Thin plates of lead magnesium niobate-lead titanate (PMN-PT) single crystal were ground with various cup-type resinoid-bonded diamond wheels on an ultra-precision surface grinder to obtain super smooth surfaces. The ground surfaces and sub-surfaces were observed with various instruments, such as laser microscope and atomic force microscope. The grinding modes such as ductile, ductile & fracture, and fracture modes are affected by grinding conditions. The relationship between finished surface roughness and grinding conditions was clarified experimentally. Very smooth surface less than 1nm Ra without micro-crack was obtained by ultra-precision one pass grinding. Compared with polishing, very sharp edges were also obtained by ultra-precision grinding.
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