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Open Accesshttps://doi.org/10.1541/ieejfms1990.119.6_860
Copy DOI Publication Date: Jan 1, 1999 | |
 Citations: 4 |  License type: free |
Affiliation: Kumamoto UniversityPLD法によるTiN成膜における高電圧パルス印加のプラズマプルームへの影響
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