PLD-prepared cadmium sensors based on chalcogenide glasses—ISFET, LAPS and μISE semiconductor structures

Abstract

In this work, ion-selective field-effect transistors (ISFET), light-addressable potentiometric sensors (LAPS) and miniaturised ion-selective electrodes (μISE) are investigated for the detection of cadmium ions in aqueous solutions for future multi-sensor applications. The sensor membranes are based on a chalcogenide glass material (CdSAgIAs 2S 3) that has been deposited as thin film onto different transducer structures by means of the pulsed laser deposition (PLD) technique. The prepared thin films were physically characterised by means of optical microscopy, Rutherford backscattering spectrometry (RBS) and scanning electron microscopy (SEM). The electrochemical characterisation was done by means of ion-selective potentiometry (μISE), current/voltage, constant current (LAPS) and constant-charge mode (ISFET) measurements.