Platinum–hydrogen complexes in silicon observed by measurements of optical absorption and electron spin resonance

Abstract

Platinum–hydrogen (Pt–H) complexes in Si doped with Pt and H by heating at 1000–1300 °C followed by quenching in water were investigated from the measurements of optical absorption at 5 K and electron spin resonance (ESR) at 8 K. Optical absorption peaks at 1909.1 and 1910.3 cm−1 were observed in addition to the peaks due to the PtH and PtH2 complexes. The H doping temperature dependence of these peaks showed that the number of H atoms in the complex responsible for the 1909.1 cm−1 peak is larger than that for the 1910.3 cm−1 peak. We also observed ESR signals due to the PtH3 complex. The annealing behaviors of the 1910.3 cm−1 peak and the ESR signals were almost the same. Based on these results, the 1909.1 and 1910.3 cm−1 peaks are, respectively, assigned to the PtH4 complex and the PtH3 complex.