Platinum Nanostructure Growth Using Self-Assembled Fluorocarbon Structure

Abstract

AbstractWe report on a novel approach to grow platinum (Pt) nanostructure using a self-assembled fluorocarbon structure as a template. A ring-type structure of fluorocarbon residues forms during the reactive ion etching (RIE) of SiO2 using trifluoromethane (CHF3) and oxygen as etching gases. Typical dimensions of the ring-type fluorocarbon structure are found to be ∼50 nm in diameter, ∼10 nm in wall thickness, and ∼50 nm in height in this study. Platinum nanostructure up to 100 nm in height and 50 nm in diameter are grown on the template using a low-cost thin film sputter coater for 3 minutes. The morphology and growth mechanism of fluorocarbon structure and platinum nanostructure are discussed. This work provides a simple approach to platinum nanostructure growth for a fuel-cell application.