Abstract
A technique for fabrication of PMMA microfluidic systems is described. Microfluidic structures are made by imprinting against an epoxy stamp, which is created by a twofold casting process. In the first step, a PDMS replica is obtained by casting against a SU8 master, which is followed by an epoxy casting where the PDMS replica serves as the master. The imprinted microfluidic network is sealed with a PMMA mate provided with fluidic openings using thermal bonding. A UV/O 3 pre-treatment is employed to decrease the bonding temperature of the PMMA plates and increase the reliability of the bonding process. Fabricated PMMA microfluidic systems were characterized with respect to electroosmotic mobility and zeta potential. Current monitoring technique was used for this purpose.
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