Abstract
A brief review on coating techniques for laser fusion targets is presented. Specifications for plastic target coatings are given followed by details on latest advances in application techniques. Two processes, vapor-phase pyrolysis (VPP) and the low-pressure plasma (LPP) method, are described that produce conformal coatings of the required dimensional tolerances: 1% variation in coating thickness and surface smoothness with peak-to-valley values not exceeding a few 100 Å. A VPP coater with a low-temperature deposition chamber is discussed in which two main mononers were used: di( p-xylylene) and di(2-chloro- p-xylylene). For the LPP process a capacitatively coupled a.c. (1 kHz) coater with two parallel flat-plate electrodes was used. In this process the main monomers were: p-xylene, ethylene, butadiene, and perdeuterated p-xylene. The VPP process has produced coatings as thick as 350 μm with a surface smoothness of 1 μm, and both processes (VPP and LPP) are capable of producing coatings with surface smoothnesses of a few 100 Å.
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