Abstract
Refractive index sensors can be designed for high sensitivities at small device foot-print. Using a complementary metal-oxide-semiconductor compatible process for fabrication paves the way to cheap devices enabling integrated biosensors. We present results on combining vertical Ge PIN photodetectors with metallic nanostructures such as Al nanohole arrays placed directly on top of the diode. The interaction of plasmonic resonances and photonic modes such as waveguide modes or optical modes in nanostructured photodetectors can potentially be exploited to design refractive index sensors with very high sensitivities. We discuss how the interplay of material properties and device geometry can be tailored for applications in integrated biosensing.
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