Abstract
The use of various plasmonic metals and insulators in silicon based metal–insulator–semiconductor–insulator–metal (MISIM) nanoplasmonic waveguides are investigated for use in waveguiding applications at 1.55μm. Sputtered Au, Ag, and Cu as the metal cladding with thermally grown SiO2 and ALD grown HfO2 insulating dielectric spacer layers are examined to determine how their fabrication affects the crucial metal–dielectric interface. The experimental propagation lengths and coupling efficiencies to silicon-on-insulator waveguides are compared to theoretical values, with the Au/SiO2 MISIM nanoplasmonic waveguide showing a propagation length of 7.25μm. The effect of including an adhesion layer for Au is shown to significantly increase losses.
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