Abstract

In this paper, magnetic and electric fields coupling hot filament chemical vapor deposition (HFCVD) was used to fabricate a series of carbon films varying from nanocrystalline diamonds (NCD) to carbon nanocone arrays. The surface morphology and composition of the film were examined by scanning electron microscopy and Raman spectroscopy. After adding magnetic field, the morphology of the as-grown NCD film was a serried form instead of a rugged topography obtained under the absence of magnetic field. As electric field intensity increased, the etching degree of NCD films enhanced and the structural transformation of NCD to microcrystalline graphite occurred. We proposed that magnetic and electric fields can effectively introduce plasma into HFCVD system to optimize the film deposition process and studied the impact of magnetic and electric fields. The presence of electric field promoted ionization of reactive gas, and magnetic field made these ionic gases bound to a certain area around the sample, increasing the regional density of plasma. Specially, unique carbon nanocone arrays were obtained by synergistic effect of magnetic and electric fields, which exhibited optimal electron field emission properties, showing the lowest turn-on field of 5.65V/μm.

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