Plasma-Chemical Synthesis of Oxide Powders Using Transformer-Coupled Discharge

Abstract

An experimental investigation of transformer-coupled discharge in an Ar-O2 mixture with the addition of SiCl4, TiCl4 and ZrCl4 has been carried out under the atmospheric pressure of plasma-forming gases. Discharge power and discharge heat losses have been determined, and the dispersion and phase composition of reaction products (oxide powders) has been analyzed with SEM and X-ray diffraction analysis. Investigations reveal the formation of ultrafine oxide powders in the case of vaporized chloride (SiCl4 and TiCl4) injecting into the transformer coupled discharge. In the case of fine powder (ZrCl4) injection, full oxidation was not observed and reaction products consisted of a mixture of ZrO2 and ZrOCl2. A conclusion has been made regarding the perspectives of using transformer-coupled discharge to produce ultrafine oxide powders.