Abstract
We describe the phenomenon of plasma uniformity enhancement in the recently developed simple version of the ferromagnetic inductor coupled plasma source in which a single thin ferromagnetic core having a large diameter (ferroinductor) was fully immersed in plasma. The plasma appeared due to the gas discharge driven by a comparatively low ac voltage (⩽350 V) applied to the primary winding of this core. Under certain circumstances the plasma nonuniformity did not exceed a few per cent in the radial direction as well as in the axial direction while the plasma density reached almost 1013 cm−3. A qualitative explanation of such uniformity enhancement is suggested.
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