Abstract
We show that contact properties of chemical vapor deposition (CVD)-grown graphene to metal electrode can be improved with Ar plasma treatment before metal electrode deposition. The Ar plasma treatment reduced the baseline signal of the Raman spectrum of graphene without changing main peaks of 2D and G peak and increasing D peak, supporting its effectiveness to reduce the polymer residue. Transfer length method (TLM) patterns for the plasma-treated samples exhibit more linear and neat current–voltage curve, and lower contact resistance compared with the control one (no plasma treated sample). These results support that plasma treatment is effective to improve the graphene–metal contact properties by reducing interface polymer residue.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
