Abstract
TCO/metal/TCO multilayer structures have been long used to improve the properties of transparent conducting oxides (TCOs). Herein, we investigated the influence of direct current-sputtered gold (Au) sandwiched between two CuCrO2 (CCO) layers deposited by radio frequency-sputtering at room temperature on quartz substrates. We show that this structure has the capability to increase the electrical conductivity significantly while maintaining suitable transparency. The resistivity of our optimized structure was ~28 Ω/sq, and its average transparency in the visible region was around 42%. We also showed that this structure has the capability to be deposited on polyethylene terephthalate (PET) flexible substrates with comparable properties, and plasma-treatment can further improve its features due to surface modification. The results indicate that plasma-treated CCO/Au/CCO multilayer deposited on PET substrates has a promising potential to be used as a flexible and transparent conducting electrode in solar cells and other applications.
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